微型薄膜集成氢气敏感器件的研制  

Research of Micro-film Hydrogen Sensor with Integrated

作　　者：谢贵久[1] 刘利民[1] 何迎辉[1] 贾京英[1] 景涛[1] 

机构地区：[1]中国电子科技集团公司第四十八研究所,长沙410111

出　　处：《微处理机》2011年第2期17-19,共3页Microprocessors

摘　　要：采用将类光激发二极管（即N-Si/Thin-SiO2/Thin-Ta/PdCr/Pt结构）、PdCr合金薄膜电阻、Pt加热和感温双电阻温控系统等集成的方式,研制了微型薄膜集成氢气敏感器件,能稳定测量0~2%体积分数的氢气,且具有较快的响应和恢复时间。Applying class light excitation diodes（N-Si/Thin-SiO2/ Thin-Ta/PdCr/Pt）,thin-film PdCr alloy resistors and temperature control system with Pt heating and pt temperature pairs of resistance by an integrated approach,Micro-film hydrogen sensor with integrated has been developed with fast response and recovery time and stable sensitivity in range of 0~2% hydrogen concentration.

关 键 词：氢气氢敏 薄膜 PdCr合金 PT 二极管 电阻 溅射 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]