喷雾干燥-冷等静压-烧结法制备ITO靶材的工艺研究  

Preparation of ITO Target Material by Spraying Drying-Cold Isostatic Pressing-Sintering

作　　者：李晶[1,2] 赵晓东[2] 李芝华[2] 任冬燕[2] 

机构地区：[1]西南科技大学材料科学与工程学院,四川绵阳621010 [2]中南大学材料科学与工稃学院,湖南长沙410083

出　　处：《稀有金属与硬质合金》2011年第2期38-41,46,共5页Rare Metals and Cemented Carbides

摘　　要：以化学共沉淀法制备的ITO粉末为原料,采用喷雾干燥-冷等静压-烧结法制备了ITO靶材,通过扫描电子显微镜(SEM)观察粉末、素坯及烧结后ITO靶材的表面形貌和气孔分布,并就粉末不同粒度组成对靶材压制与烧结效果的影响进行了分析。实验结果表明:通过喷雾干燥-冷等静压-烧结工艺可制备出相对密度大于97%的ITO靶材,喷雾干燥工序能有效改善粉末的流动性与压形性,以细粉为主的素坯其烧结致密化程度更高。The ITO powders were prepared by chemical precipitation and then used to prepare the ITO target material by spraying drying-cold isostatic pressing-sintering.The surface morphology and pore distribution of powder,bisque body and sintered ITO target material were examined by SEM.The influences of different powder particle size distribution on pressing and sintering of the target material were discussed.The results indicate that the ITO target material with a relative density over 97% can be obtained by spraying drying-cold isostatic pressing-sintering.Spraying drying can effectively enhance the fluidity and pressing performance of powder,and the bisque body mainly composed of small particles shows a higher sintering density.

关 键 词：ITO靶材 喷雾干燥 冷等静压 烧结 

分 类 号：TB383[一般工业技术—材料科学与工程]