基于MEMS可编程光栅检测甲烷的研究  

Research of Detection Methane Based on MEMS Programmable Gating

作　　者：吕振[1] 董璞[1] 

机构地区：[1]辽宁工程技术大学电气与控制工程学院,辽宁葫芦岛125105

出　　处：《压电与声光》2011年第3期368-371,共4页Piezoelectrics & Acoustooptics

基　　金：辽宁省高校创新团队项目计划基金资助项目(2007T074)

摘　　要：介绍了基于微机电系统(MEMS)技术的微型可编程光栅的光学特性。分析了可通过对可编程光栅编程状态的预先设定,使其衍射输出对应于不同目标物质的光谱。提出了一种全新的基于微型可编程光栅的相关光谱法检测甲烷的方法。通过实验表明:该法不仅可对多种气体成分进行检测,且有很高的检测精度,并具备传统检测方法无法比拟的优点。The optical characteristic of micro programmable grating based on the MEMS technology is introduced in this paper.It is analyzed that the state of the micro programmable grating can be prescribed,and the diffractive emergent light will correspond to the spectra of target substance.A new method of detecting methane based on the micro programmable gating and correlation spectroscopy is proposed.The experimental results showed that this method not only may carry out the examination to many kinds of gas ingredients,but also has the very high examination precision.And it has some merits which the traditional examination method is unable to reach.

关 键 词：微机电系统 可编程光栅 模拟光谱 相关光谱 甲烷 

分 类 号：TP212.14[自动化与计算机技术—检测技术与自动化装置]