类Ni稀土X光激光波段衰减膜的设计与研究  

DESIGN AND RESEARCH OF ATTENUATION FOIL FOR THE WAVEBAND OF Ni LIKE RARE EARTH X RAY LASER

作　　者：汤学峰[1] 顾牡[1] 周斌[1] 杜保旗[1] 祁金林[1] 赖珍荃[1] 陈玲燕[1] 

机构地区：[1]同济大学玻耳固体物理研究所,上海200092

出　　处：《强激光与粒子束》1999年第4期428-432,共5页High Power Laser and Particle Beams

基　　金：国家863 激光技术领域及激光青年基金资助课题

摘　　要：对类 Ｎｉ稀土 Ｘ 光激光波段衰减膜进行了设计，并根据设计结果，利用磁控溅射和旋转涂覆法分别制备了自支撑的 Ａｇ 衰减膜和聚苯乙烯（ Ｃ８ Ｈ８）衰减膜。利用真空 α能谱测厚仪和 αｓｔｅｐ１００ 台阶仪分别对衰减膜的质量厚度和均匀性进行了测量，用 Ａｕｇｅｒ 电子能谱（ Ａ Ｅ Ｓ）对 Ａｇ 衰减膜进行了表面杂质分析。The design of attenuation foils for the waveband of Ni like rare earth X ray Laser is described. According to the results of the design, the self support silver and polystyrene(C 8H 8) attenuation foils are made by magnetron sputtering and spin coating respectively. The mass thickness of the foils and their thickness homogeneity are measured by an α energy spectrum mass thickness apparatus and an α step100 thickness measurement apparatus respectively. The surface impurities of silver attenuation foil are analyzed using Auger Electron Spectroscope.

关 键 词：衰减膜 聚苯乙烯 X光激光 稀土 

分 类 号：TN243[电子电信—物理电子学]