微型MOEMS阿达玛变换近红外光谱仪  

Micro Hadamard Transform Near-Infrared Spectrometer

作　　者：张智海[1,2] 莫祥霞[1,2] 郭媛君[1,2] 王伟[1,2] 

机构地区：[1]重庆大学光电技术及系统教育部重点实验室,重庆400044 [2]重庆大学新型微纳器件与系统技术国家重点学科实验室,重庆400044

出　　处：《光谱学与光谱分析》2011年第7期1975-1979,共5页Spectroscopy and Spectral Analysis

基　　金：国家中央高校基本科研业务费(CDJZR10120017)资助

摘　　要：提出一种运用微光机电系统（micro-opto-electro-mechanical systems,MOEMS）闪耀光栅,动态产生阿达玛变换模版的微型近红外光谱仪。它具有体积小、价格低、扫描速度快等突出优点。分析了这种新型近红外光谱仪的结构和工作原理,通过对MOEMS闪耀光栅编程,动态生成了63阶阿达玛模版。实验得到的光谱波形与岛津光谱仪测量结果吻合。检测波长范围为900-1 500 nm,分辨率为19 nm,单次扫描时间2.4s,信噪比为44.67∶1,光路尺寸为70 mm×130 mm,总体重量〈1 kg,符合实时、便携的要求。A new type micro Hadamard transform（HT） near-infrared（NIR） spectrometer is proposed in the present paper.It has a MOEMS（Micro-Opto-Electro-Mechanical Systems） blazed grating HT mask.It has merits of compactness,agility of dynamic mask generation and high scan speed.The structure and theory of this spectrometer are analyzed.The 63-order Hadamard-S matrix and mask are designed.The mask is dynamically generated by program of MOEMS blazed gratings.The spectrum is in agreement with that measured by Shimadzu spectrometer in experiments.It has a wavelength range between 900 and 1 700 nm,spectral resolution of 19 nm,single scan time of 2.4 s,SNR of 44.67∶1,optical path of 70 mm×130 mm,and weight under 1 kg.It can meet the requirement of real time detection and portable application.

关 键 词：近红外光谱仪 阿达玛变换 微光机电系统 闪耀光栅 

分 类 号：TH744.1[机械工程—光学工程]