碳纳米管压力传感器研究进展  

Progress of Carbon Nanotube-based Pressure Sensors

作　　者：张锦文[1] 李伟[1,2] 

机构地区：[1]北京大学微电子学研究院微米/纳米加工技术国家级重点实验室,北京100871 [2]北京大学深圳研究生院,深圳518055

出　　处：《功能材料与器件学报》2011年第3期253-257,共5页Journal of Functional Materials and Devices

摘　　要：碳纳米管因其独特而优异的电学、力学、热学、化学及电子特性等在很多领域上展现应用的潜力,而近年来碳纳米管在压力传感器方面的应用成为研究热点之一。本文综述了碳纳米管压力传感器的基本原理以及研究进展,并对不同类型的碳纳米管压力传感器进行了比较。Carbon nanotube will have many potential applications in the future due to its unique electrical,mechanical,thermal,chemical and electronic properties.Carbon nanotube-based pressure sensors have been explored and studied by many researchers in recent years.Their working principles and progress are reviewed in this paper.In the meantime,three different types of carbon nanotube-based pressure sensors are compared.

关 键 词：碳纳米管 压力传感器 压阻特性 场发射特性 温敏特性 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]