电容式硅微机械陀螺仪结构设计及仿真  

The Structure Design and Simulation of Capacitive Silicon Micromechanical Gyroscope

作　　者：赵幸娟[1] 王瑞荣[1] 石云波[1,2] 刘俊[1,2] 唐军[1,2] 

机构地区：[1]中北大学电子测试国家重点实验室,山西太原030051 [2]中北大学仪器科学与动态测试教育部重点实验室,山西太原030051

出　　处：《功能材料与器件学报》2011年第3期333-337,共5页Journal of Functional Materials and Devices

基　　金：高灵敏度多层纳米膜隧穿微陀螺仪研究(50675212);重点实验室基金(NO.9140C1204021008)

摘　　要：通过对微机械陀螺的调研分析,提出了一种新型微机械陀螺仪,并对陀螺进行了结构设计。该结构采用静电梳齿驱动、栅结构电容检测,使陀螺具有较高灵敏度。驱动模态和检测模态均为滑膜阻尼,能够实现较高的Q值,且具有一定的解耦特性。文中通过仿真分析得到了结构的各阶频率,使陀螺驱动模态和检测模态固有频率匹配,验证了结构的合理性。结合现有加工工艺水平进行了加工,并验证了其高灵敏度特性。By researching and analyzing the micromechanical gyroscopes,a novel micromechanical gyroscope is proposed and the structure is designed.The method of electrostatic comber drive,capacitive detection of bar structure is used for the structure,and it makes the gyroscope high sensitivity.Slide-film damping is the main air damping of the drive mode and detect mode.It is possible to achieve high Q-values at atmospheric pressure.The gyroscope has the decoupled characteristic.By large number of simulation analysis,frequencies of every mode are gained.Nature frequencies in drive mode and sense mode match.Rationality of the structure is validated.Based on the current technology level,the structure is made,and high sensitivity is validated,too.

关 键 词：硅微机械陀螺 电容检测 结构设计 

分 类 号：TP212.12[自动化与计算机技术—检测技术与自动化装置]