双高斯复杂化结构显微物镜设计  

Complicated Double Gs Microscopical Object Lens Design

作　　者：刘金荣[1] 李玉敏[1] 

机构地区：[1]中国电子科技集团公司第四十五研究所,北京101601

出　　处：《电子工业专用设备》2011年第6期13-15,共3页Equipment for Electronic Products Manufacturing

摘　　要：介绍了一种用于曝光机的对准显微物镜设计及结果分析,物镜采用共轭距无限远类型,针对传统的用于照相的双高斯结构进行了复杂化设计,并对光学系统进行了优化,实现了长工作距离、平场和长景深。A sort of design and the analysis of the experiment result for Align microscope object lens.which is equipped on Mask Aligner,has been introduced.A kind of Conjugate infinity distance Type has been used in the object lens.For the traditional double Gs structure employed for taking pictures,a complex design has been used.In addition,the optics system has also been improved for long working distance,flat-field,and scene depth.

关 键 词：曝光机 对准显微物镜 共轭距无限远类型 双高斯结构 

分 类 号：TN16[电子电信—物理电子学]