基于PSD的激光跟踪坐标测量系统  

Laser tracking coordinate measurement system based on PSD

作　　者：张亚娟[1] 裘祖荣[1] 李杏华[1] 陈新华[1] 

机构地区：[1]天津大学精密测试技术及仪器国家重点实验室,天津300072

出　　处：《传感器与微系统》2011年第7期116-119,共4页Transducer and Microsystem Technologies

摘　　要：建立了基于位置敏感探测器(PSD)的激光跟踪坐标测量系统,分析了单路球坐标激光跟踪测量系统的结构与跟踪系统对PSD信号处理电路的要求,搭建了快速、准确的PSD信号处理电路;找出了PSD上的位置反馈信息与被跟踪目标位移的对应关系。针对光路调节方法和光路误差对测量误差的影响,分析了光路对跟踪控制的影响。实验证明:所建立的跟踪控制系统可实现对目标的快速、准确跟踪。对建立单路激光跟踪坐标测量系统并实现快速跟踪功能具有很大的参考价值。A control system which has rapid response and large angel measuring range is setup,The structure of standalone laser tracking system is analyzed.A fast position sensitive detector（PSD）signal processing circuit based on DSP is provided.The matrix for the conversion between the coordinate of PSD light point and cat eye displacement is derived and the method for computing motor velocity is given.The impact of optical path on system controlling and measurement precision is studied.At last,experiment proves that the control method is effective and can provide a rapid and exact tracking to the target lens.

关 键 词：激光跟踪 控制模型 位置敏感探测器 信号处理 光路调节 

分 类 号：TH741[机械工程—光学工程]