注射超声喷雾热分解方法制备ZnO薄膜研究  

A Study on ZnO Thin Films Prepared by Injection Ultrasonic Spray Pyrolysis

作　　者：朱江[1] 佟帅[1] 高德文[1] 张志乾[1] 颜炳嘉[1] 孙凯[1] 武光明[1] 

机构地区：[1]北京石油化工学院,北京102617

出　　处：《北京石油化工学院学报》2011年第2期9-12,共4页Journal of Beijing Institute of Petrochemical Technology

基　　金：北京市教育委员会科技发展计划资助项目;项目号:KM201110017004

摘　　要：以乙酸锌为原料加水合成ZnO前驱液,利用注射超声喷雾热分解方法在玻璃衬底上成功制备ZnO薄膜。通过正交选择液体注射速度、注射量、衬底温度、退火温度为实验要素,通过XRD、SEM、可见光透过率分析优化的制备条件为:液体注射速度为0.2 mL/min,注射量为3 mL,衬底温度为450℃,退火温度为500℃。制备的ZnO薄膜透光率达到85%。新的制备薄膜装置采用注射超声雾化手段,克服其雾化不均问题。Using ZnO precursor solution,which is synthesized by zinc acetate that is acted as the raw material with water,ZnO thin films are successfully prepared on glass substrates by the self-made injection ultrasonic spray pyrolysis device.Experimental factors,including liquid injection rate,injection volume,and substrate temperature and annealing temperature,are optimized through orthogonal experiment.The XRD,SEM,and visible light transmittance analysis results indicate that the optimized preparation conditions are as follows： liquid injection rate 0.2mL/min,injection volume 3mL,substrate temperature 450℃,and annealing temperature 500℃.The transmittance of ZnO thin films prepared under optimized conditions is up to 85%.The new thin-film preparation device using the injection ultrasonic spray can overcome the problem of uneven atomization.

关 键 词：注射 超声 喷雾热分解 ZNO薄膜 

分 类 号：TB304.055[一般工业技术—材料科学与工程]