基于光纤-镜面干涉腔的光纤加速度计  

Fiber optic accelerometer based on fiber-mirror interference cavity

作　　者：林巧[1] 陈柳华[1] 李书[1] 吴兴坤[1] 

机构地区：[1]浙江大学现代光学仪器国家重点实验室,浙江杭州310027

出　　处：《光学精密工程》2011年第6期1179-1184,共6页Optics and Precision Engineering

基　　金：国家自然科学基金资助项目(No.60577025)

摘　　要：设计、研制了一种基于光纤-镜面干涉腔的光纤加速度计。介绍了该加速度计的传感原理及弹性结构设计,并对其性能进行了实验测试。该加速度计用固定于圆网状弹性结构上的硅微反射镜与处理过的光纤端面构成光纤-镜面干涉腔来产生相位差随外界加速度改变的光干涉信号;采用相位生成载波技术通过对干涉信号的调制和解调实现对相位差的精确测定。应用工程软件Cosmosworks(Solidworks)对该加速度计弹性结构的灵敏度进行了理论分析,并与样机测试比较。结果表明,该光纤加速度计的灵敏度为63.2rad/g,共振频率为160Hz,分辨率为4μg而动态范围接近108,结果与理论分析符合得较好。该加速度计不仅结构简单,还集成了多维加速度计的优势。An optical fiber accelerometer was designed based on a fiber-mirror interference cavity.The sensing principle and elastic structure of the accelerometer were introduced and its performance was measured.A silicon micro-mirror mounted on a mesh spring elastic structure and a fiber facet were used to form a fiber-mirror cavity to generate optical interference signals as a function of acceleration.A Phase Generated Carrier（PGC） technology was adopted to modulate the interference signals to obtain phase difference signals with high resolution.Finally,the strain analysis of elastic structure was performed by Cosmosworks（Solidworks） to calculate the sensitivity.The performance measurement of prototype shows that the accelerometer can offer a sensitivity of 63.2 rad/g in the resonance frequency of 160 Hz and a resolution of 4 μg with a dynamic range near 108.Furthermore,the accelerometer is structure simple and easy to be intergrated and multi-dimensioned.

关 键 词：光纤加速度计 相位生成载波技术 灵敏度 分辨率 

分 类 号：TN253[电子电信—物理电子学]