应用条纹投影法测量薄膜反射镜的成形  

Measurement of space membrane mirror shaping based on fringe projection

作　　者：张鹏[1,2] 张元[1] 金光[1] 钟兴[1] 张雷[1] 姚劲松[1] 

机构地区：[1]中国科学院长春光学精密机械与物理研究所,吉林长春130033 [2]中国科学院研究生院,北京100039

出　　处：《光学精密工程》2011年第6期1185-1191,共7页Optics and Precision Engineering

基　　金：国家863高技术研究发展计划资助项目(No.2007AA12Z113)

摘　　要：针对国内外现有薄膜反射镜面形检测方法存在动态测量不便,测量面形单一等问题,提出了基于正弦条纹投影的反射镜面形测量方法。基于此方法搭建了测量平台,分析推导显示,该方法的测量不确定度<0.385μm,该平台的测量不确定度<4.25μm。在此平台上对标准球面镜进行了测量,验证了此平台的适用性。最后,对优化控制下的Ф300mm静电拉伸薄膜反射镜的面形进行了多次测量,结果表明,中心矢高测量值与理论值基本一致,优化后最佳镜面面形RMS值为5μm,PV值为39μm,相对于优化前RMS值减少了34.17%,PV值减少了26.4%,显示所搭建的基于正弦条纹投影方法的测量平台满足了现阶段薄膜反射镜面形测量的需要;而提出的面形控制算法可控制薄膜反射镜得到所需面形,并有效地提高面形精度。In consideration of the inconvenience of dynamic measurement and the measuring limitation for surface shapes of mirrors in exciting measuring method,a shape measurement method based on sinusoidal fringe projection was proposed,and a test platform was built.Analysis and deduction indicates that the measurement uncertainty of the method is less than 0.385 μm and that of the platform is less than 4.25 μm.A standard spherical mirror was measured on this test platform to verify the feasibility of the platform.Finally,surface figures and surface figure errors of a Ф300 mm electrostatic stretching membrane mirror were measured with the proposed method and surface shape control algorithm.Results show that the measured values of center sag are consistent with theoretical ones.Furthermore,the RMS and PV values of shape surface are 5.214 μm and 39.327 μm,which has reduced about 30.17% and 23.7%,respectively.The results display that the shape measurement platform based on sinusoidal fringe projection meets the need of membrane mirrors for shape measurement and the membrane mirror surface shape control algorithm can control the membrane mirror to obtain the required surface shape and improve the surface accuracy.

关 键 词：薄膜反射镜 面形测量 正弦条纹投影 优化控制 

分 类 号：TH751[机械工程—仪器科学与技术] TH703[机械工程—精密仪器及机械]