硫化锌交流电致发光薄膜结构与特性研究  被引量:1

Studies of Microstructure and ACEL Characteristicsin Zinc Sulfide Thin Films

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作  者:王余姜[1] 柳兆洪[1] 陈谋智[1] 李丽美 刘瑞堂 

机构地区:[1]厦门大学物理系,361005

出  处:《固体电子学研究与进展》1999年第3期294-297,共4页Research & Progress of SSE

基  金:福建省自然科学基金

摘  要:用电子束研制不同介质膜作绝缘层的掺铒硫化锌交流电致发光薄膜器件,用X射线衍射技术测量薄膜表面结构,发现薄膜多晶的沉积有择优取向的趋势。观察不同绝缘层交流电致发光器件的初始稳定过程,讨论绝缘层质量对交流电致发光器件的影响。The devices of ZnS:Er 3+ thin film of alternating current electroluminescence (ACEL) are prepared with different insulation dielectric film respectivily. Their insulation layers are prepared by electron beam evaporation. The crystallite structure of the ZnS:Er 3+ films are measured by using X ray diffraction (XRD) technology. The results show that the deposited polycrystalline films have a trend of preferred orientation. The originally electroluminescence steady process of the thin film devices with different insulation layers are observed, and the effects of prepared insulation dielectric layer quality on alternating current electroluminescence are discussed as well.

关 键 词:薄膜结构 交流电致发光 硫化锌薄膜 

分 类 号:TN304.25[电子电信—物理电子学] O484.1[理学—固体物理]

 

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