数字散斑相关技术在扫描电镜三维重构中的应用  

Application of Digital Speckle Correlation to SEM 3D-reconstruction

作　　者：张俪文[1] 张旦闻[2] 任凤章[3] 

机构地区：[1]中国矿业大学环境与测绘学院,江苏徐州221000 [2]洛阳理工学院机电工程系,河南洛阳471023 [3]河南科技大学材料科学与工程学院,河南洛阳471003

出　　处：《河南科技大学学报（自然科学版）》2011年第4期14-18,108,共5页Journal of Henan University of Science And Technology:Natural Science

基　　金：国家自然科学基金项目(50771042);河南省科技创新人才计划项目(104100510005);河南省高校科技创新人才支持计划项目(2009HASTIT023);洛阳市应用技术研究与开发基金项目(0901011A)

摘　　要：将数字散斑图像相关技术应用到扫描电镜的三维重构中。首先,用扫描电镜获取试样的立体像对,应用立体摄影测量技术计算出高程。分别用显微硬度压痕实验数据和体积不变原则,对三维重构计算结果进行了验证,完成了对刀具磨损面的三维重构和成分分析。结果表明:扫描电镜三维重构与验证结果相吻合,基于数字散斑相关的扫描电镜三维重构技术可以准确反映刀具磨损表面的微观形貌,结合微区的能谱分析可全面评价刀具的磨损情况。This paper presented a scanning electron microscope(SEM)3D-reconstruction technique based on the digital speckle correlation method.The 3D-reconstruction was achieved from SEM stereo image pairs by use of photogrammetric surveying theory.Both of the microhardness trace measurements and the principle of constant volume were introduced to validate the results.The SEM 3D-reconstruction of wear surface from cutting tool test was established.Validating tests showed that the 3D-reconstruction was well consistent with the measuring results.SEM 3D-reconstruction of the wear area with the assistance of micro area energy spectrum analysis of the wear area for cutting tool can provide an effective approach to estimate tool wear.

关 键 词：磨损 扫描电镜 三维重构 数字散斑 

分 类 号：TB863[一般工业技术—摄影技术]