圆光栅检测仪的研制  

Development of Circle Grating Tester

作　　者：李俊强[1] 熊昌友[1] 李太景[1] 焦仁民[1] 

机构地区：[1]北京长城计量测试技术研究所,北京市1066信箱100095

出　　处：《航空计测技术》1999年第6期30-33,41,共5页Aviation Metrology & Measurement Technology

摘　　要：介绍了一种高精度、精密、自动化、动态测量的光栅检测仪，测量光栅盘的扩展不确定度为0．08″。该仪器采用了高回转精度的空气静压轴承及多头均化技术，减小了参考盘刻划误差的影响，同时，采用了计算机系统控制测量过程，进行数据处理，实现了自动化测量，检测结果和误差曲线由打印机打印输出。An automatic circle grating dynamic testing instrument with high accuracy is presented in this paper- The expending uncertainty during dynamic measurement of circle grating is O. O8'. A high rotation precision air static pressure bearing and multiprobe homogenization technique are adopted tothe instrument for decreasing the effect of the error of the reference ruled grating disc- In the meantime,the computer system is adopted to control the measuring process and process the data, thereby theautomatic measurement is realized. The result of test and measurement and the error curve are printedby the printer.

关 键 词：圆光栅 计算机 自动检测 计量光栅 不确定度 

分 类 号：TH741.62[机械工程—光学工程]