压阻式振动传感器非线性研究及其改进措施  

Study and Improving Method for Pressure-Resistance Vibrancy Transducer NIonlinear

作　　者：董利凯[1] 孙光岩[1] 刘其中 

机构地区：[1]中国电子科技集团公司第四十九研究所传感器工程与产品设计中心,哈尔滨市150001 [2]二炮驻哈尔滨地区军事代表室,哈尔滨市150001

出　　处：《仪器仪表标准化与计量》2011年第3期43-45,共3页Instrument Standardization & Metrology

摘　　要：调试压阻式振动传感器时,在接近截止频率,振动量级接近产品量程上限时,传感器灵敏度急剧下降。针对这个现象,本文首先叙述了压阻式振动传感器原理和非线性的概念,然后从压阻式振动传感器组成的三个方面对传感器非线性问题进行了分析。一是敏感元件制造设备和制作工艺的限制;二是信号处理电路带来的偏差;三是电容带来的影响。采取改进措施后,做了大量的验证试验,得到了详实可靠的试验结果。通过本文所述的改进方法,可有效的改善压阻式振动传感器的非线性指标。The sensitivity of the pressure- resistance vibrancy transducer drops acutely, when adjusting the pressure- resistance transducer about the end frequency, upper limit of scale. In consideration of phenomenon,this paper describes the principle of the pressure- resistance and the concept of nonlinear, then analysises the reason of nonlinear from three aspects.First,the limit of the chip manufacture and technics;second,the warp arosing from circuit;three,the effect of cap.After taking the improving and credible test results were obtained. The meathod can effectively. method,a lot of tests were maken out,and many accurate improve the nonlinear of pressure- resistance transducer

关 键 词：压阻原理 振动传感器 非线性 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]