微阵列制备机器人分向前馈误差补偿控制  

Two-way feed-forward error compensation control of a microarray production robot

作　　者：刘飞[1] 吴丹[1] 陈恳[1] 宋立滨[1] 潘玉龙[1] 

机构地区：[1]清华大学精密仪器与机械学系,摩擦学国家重点实验室,北京100084

出　　处：《清华大学学报（自然科学版）》2011年第5期582-586,共5页Journal of Tsinghua University(Science and Technology)

基　　金：国家“八六三”高技术项目(2009AA043701);摩擦学国家重点实验室项目(SKLT09A03)

摘　　要：为了提高半闭环微阵列制备机器人的定位精度,根据机器人运动误差具有方向性的特点,提出了分向前馈误差补偿技术。建立了微阵列制备机器人系统误差前馈补偿的传递函数模型,对系统的准确性、快速性与稳定性进行分析,从理论上证明该方法在提高机器人精度方面是可行有效的。研究并实施了回程误差与其他非线性误差的分向补偿算法。在清华大学开发的THU-biorobot微阵列制备机器人上进行了实验研究。结果表明:补偿后机器人的定位精度在±5μm以内,系统动态性能也有显著提高,能够满足微阵列制备要求。The positioning accuracy of a semi-closed control loop for a robot to produce microarrays was improved by a two-way feed-forward error compensation method based on the fact that the motion errors of the robot are directional.The motion control transfer function including the feed-forward compensation block was used to analyze the accuracy,speed and stability of the robotic system.This showed that error compensation method can significantly improve the accuracy.Two-way error compensation was then developed for the hysteresis error and other nonlinear errors.Tests on the THU-biorobot microarray production system demonstrated by Tsinghua University that the positioning error was reduced to less than ±5 μm,with the dynamic performance significantly improved by the error compensation method.

关 键 词：微阵列制备机器人 定位精度 分向补偿 前馈误差补偿 回程误差 

分 类 号：TH7[机械工程—仪器科学与技术]