玻璃基板激光选区镀膜研究  

Investigation on selective laser coating on glass substrate

作　　者：李晓刚[1] 陈继民[1] 刘富荣[1] 李晓宇[1] 张强[1] 

机构地区：[1]北京工业大学激光工程研究院,北京100124

出　　处：《光电子．激光》2011年第8期1196-1199,共4页Journal of Optoelectronics·Laser

基　　金：北京市教委重点资助项目(KZ200910005006)

摘　　要：针对传统制备导电薄膜工艺复杂、成本高,且在激光直写导电膜中存在所加入的辅料造成杂质污染以及膜的厚度和粗糙度难以降低等问题,本文采用玻璃衬底激光制备Zn/Al混合粉末生成导电薄膜,实现了无粘结剂和辅料的薄膜生成,研究了工艺参数调节对膜的生成质量的影响。结果表明,过低或过高的激光扫描速度都会使表面粗糙度增加,扫描速度过慢时薄膜表面被严重破坏,过快时导致附着不完全区域的出现;薄膜厚度随扫描速度变化,在表面附着的颗粒随扫描速度降低发生融合现象,膜厚将增大。优化参数后得到了粗糙度低于20nm、膜厚低于500nm的导电薄膜。Compared with the traditional method, the selective laser coating method has obvious advanta ges of high flexibility,low cost and easy operation. It is difficult to reduce the thickness and roughness of conductive films using the direct laser writing method. The 1 064 nm pulsed fiber laser can pass through the glass substrate and irradiate on the contact interface between glass and metal powder. After the irradiation,satisfactory conductive films could be made. Process parameters of the laser have significant influence on the quality of conductive films. Both low and high scanning speeds will increase the surface roughness. The thickness and the particle size of conductive thin films will change with the scanning speed decreased.

关 键 词：激光加工 导电薄膜 选区镀膜 金属粉末 

分 类 号：TN249[电子电信—物理电子学]