新型的形状记忆合金/硅薄膜微驱动器  

A novel microactuator with NiTi thin film shape memory alloy and Si membrane structure

作　　者：徐东[1] 蔡炳初[1] 丁桂甫[1] 王莉[1] 

机构地区：[1]上海交通大学信息存储研究中心,上海200030

出　　处：《微细加工技术》1999年第4期51-55,共5页Microfabrication Technology

摘　　要：介绍了一种用硅微加工技术制作的ＮｉＴｉ／Ｓｉ 薄膜结构的双向微驱动器。它利用ＮｉＴｉ 形状记忆合金薄膜（ＳＭＡ） 大的相变回复应力和Ｓｉ 衬底膜的反偏置力产生有一定位移量的双向运动。对ＮｉＴｉ 薄膜进行合理的图形化后使得驱动器位移量增大，双向效应显著，响应速度提高。同时图形化后的ＮｉＴｉ 膜也是加热电阻，使驱动结构简单，所需功率减少。驱动器实际驱动面积为３ ×３ｍ ｍ２ 厚度为２０μｍ 。可产生的最大位移为５０μｍ ，最高驱动频率可达１００Ｈｚ。驱动功率可减小到２００ｍ Ｗ。经过１０００ 万次振动后，驱动膜无开裂，性能正常。它已被成功的应用于压缩型微泵，该泵最大流量达３４０μＬ／ｍｉｎ 。A two-way actuator with NiTi/Si composite membrane structure was investigated,which utilized shape recoverable force of NiTi thin film shape memory alloy (SMA)and biasing force of Si membrane.Larger stroke,bigger two way effect and faster response speed of actuator are obtained in optimized design of patterned NiTi thin film.The required power reduces dramatically by using patterning of NiTi thin film for the self heating element,and also the structure of actuator is very simple.The size of the actuated membrane is 3mmx3mmx20μm It produces displacement up to 50μm vertically and the driving frequency of the actuator can reach to 100Hz.The fracture of membrane did not appear after 10 million reciprocating cycles.The driving power can be reduced to 200mW.It is working in the reciprocating micropump successfully and a maximum flow rate of 34min is achieved.

关 键 词：薄膜 形状记忆合金 微驱动器 硅 微机电系统 

分 类 号：TP271.4[自动化与计算机技术—检测技术与自动化装置]