Zr_(0.5)Ti_(0.5)O_2纳米薄膜的光电性能  

Photoelectric Properties of Zr_(0.5)Ti_(0.5)O_2 Nano Thin Films

作　　者：张海峰[1] 张敏[1] 阮圣平[1] 孟凡旭[1] 冯彩慧[1] 徐洋[1] 陈维友[1] 张歆东[1] 

机构地区：[1]集成光电子学国家重点联合实验室吉林大学实验区吉林大学电子科学与工程学院,长春130012

出　　处：《高等学校化学学报》2011年第8期1785-1788,共4页Chemical Journal of Chinese Universities

基　　金：国家自然科学基金(批准号:60977031;50977038)资助

摘　　要：采用溶胶-凝胶法制备了Zr0.5Ti0.5O2复合氧化物纳米薄膜,通过X射线衍射分析(XRD)、扫描电镜分析(SEM)、紫外-可见吸收光谱(UV-Vis)和X射线光电子能谱(XPS)等方法对材料进行了表征.结果表明,纳米薄膜为Zr∶Ti原子比为1∶1的复合材料,薄膜表面平整、致密、光滑,皲裂情况较单纯的TiO2和ZrO2薄膜有明显改善;另外,由于Zr的掺入,薄膜在紫外光波段具有良好的吸收,吸收带较TiO2薄膜有明显的蓝移.通过标准的光刻剥离技术和磁控溅射技术在Zr0.5Ti0.5O2纳米薄膜上制作了叉指型的金属电极.在5 V偏压下,样品对可见光不吸收,对260 nm的紫外光有明显的光电响应,光电流与暗电流之比接近3个数量级.The Zr0.5Ti0.5O2 nano thin films were prepared by a sol-gel method and characterized by means of XRD,SEM,XPS and UV-Visible absorption spectra.XPS analysis indicated that the atom ratio between Zr and Ti was 1∶1.The SEM image shows that the surface of Zr0.5Ti0.5O2 film is flat and not chapped,which is better than that of pure ZrO2 and TiO2 films.In addition,the film＇s abortion edge shows obvious blue shift with the Zr doping.Based on the Zr0.5Ti0.5O2 thin film,planar interdigitated electrodes were prepared and then tested.At 5 V bias,the sample was insensitive to visible light but exhibit significant response under the irradiation of 260 nm UV light.

关 键 词：溶胶-凝胶法 ZrxTi1-xO2纳米薄膜 光电性能 

分 类 号：O641[理学—物理化学] O644[理学—化学]