飞秒激光诱导ZnO:Al薄膜周期结构及其光致发光特性  

Periodic Nanoripples and Photoluminescence on ZnO:Al Film Induced by Femtosecond Laser Pulses

作　　者：周侃[1,2] 冯东海[2] 李霞[1,2] 贾天卿[2] 刘建胜[1] 徐至展[1] 

机构地区：[1]中国科学院上海光学精密机械研究所强场激光物理国家重点实验室,上海201800 [2]华东师范大学精密光谱科学与技术国家重点实验室,上海200062

出　　处：《光学学报》2011年第8期224-228,共5页Acta Optica Sinica

基　　金：国家973计划(2010CB923203);国家自然科学基金(10874044;10904038);上海市曙光学者项目(07SG25);教育部新世纪优秀人才计划;上海市科学技术委员会资助项目(09142200500;09JC1404700;09ZR1409300)资助课题

摘　　要：利用单束800nm飞秒激光在掺杂了Al的ZnO薄膜中制备了纳米周期条纹结构。研究了不同能流密度的飞秒激光在照射不同的时间后,表面纳米周期结构的变化规律及其形成机制。利用He-Ge激光器作为激发光源,研究了ZnO:Al薄膜的光致发光特性及其与纳米周期结构的关系。结果表明,近带隙发光增强的主要原因是800nm飞秒激光在诱导纳米周期结构的同时对ZnO:Al薄膜的淬火作用和周期纳米条纹对He-Ge激光的吸收增加。The periodic nanoripples on ZnO：Al films induced by 800 nm femtosecond laser pulses are prepared. The regularity and formation mechanism of surface periodical nanostructure are studied after it is irradiated by femtosecond laser of different energy flux densities. Using He-Ge laser as light source, the photoluminescence spectra of ZnO：Al films and its relationship with periodical nanostructures are studied. It is shown that the enhancement of emission near the band gap results from the quenching effect by 800 nm femtosecond laser on ZnO：Al films and the increase in optical absorption of He-Ge laser by the nanoripples.

关 键 词：光学材料 纳米周期条纹 光致发光 飞秒激光 ZNO:AL薄膜 

分 类 号：O433[机械工程—光学工程]