Ti—B—N纳米复合薄膜的制备及结构和力学性能  

Preparation,microstructure and mechanical properties of Ti-B-N nanocomposite coatings

作　　者：罗庆洪[1] 娄艳芝[1] 李春志[1] 陆永浩[2] 

机构地区：[1]北京航空材料研究院,北京100095 [2]北京科技大学材料科学与工程学院,北京100083

出　　处：《北京科技大学学报》2011年第8期1001-1005,共5页Journal of University of Science and Technology Beijing

摘　　要：利用反应磁控溅射方法在(100)单晶硅和高速钢(W18Cr4V)基片上制备出不同B含量的Ti--B--N纳米复合薄膜.使用X射线衍射(XRD)和高分辨透射电镜(HRTEM)研究了Ti--B--N纳米复合薄膜的组织结构,并用纳米压痕仪测试了它们的纳米硬度和弹性模量.结果表明:通过改变TiB2靶功率和Ti靶功率的方法可制备出非晶--纳米晶复合结构的Ti--B--N薄膜;Ti--B--N薄膜中主要含有TiN纳米晶,随着B含量的增加,形成的TiN纳米晶尺寸变小,非晶成分增加;当B含量很高时会出现很小的TiB2纳米晶,此时薄膜性能不好;当TiN晶粒尺寸为5 nm左右时,Ti--B--N薄膜力学性能最优,纳米硬度和弹性模量分别达到32.7 GPa和350.3 GPa.Ti-B-N nanocomposite coatings with different B contents were deposited on Si（100） and high speed steel（W18Cr4V） substrates by reactive magnetron sputtering.The microstructures of the coatings were characterized by X-ray diffraction（XRD） and high-resolution transmission electron microscopy（HRTEM）.Meanwhile the nanohardness and elastic modulus values were measured by nano-indention method.It is indicated that Ti-B-N nanocomposite coatings can be prepared by changing the power of TiB2 targets and Ti targets.The deposited Ti-B-N coatings mainly consist of TiN nanocrystals.With the B content increasing,the sizes of TiN nanocrystals become smaller,and the amorphous component increases.When the B content is very high,the sizes of TiB2 nanocrystalline phase in the Ti-B-N coatings are very small and the coatings＇ properties are poor.When the TiN grain size is about 5nm,the Ti-B-N coatings have the best mechanical properties,with the nanohardness of 32.7GPa and the elastic modulus of 350.3GPa.

关 键 词：纳米复合薄膜 磁控溅射 微观结构 力学性能 

分 类 号：TB383[一般工业技术—材料科学与工程] O484.1[理学—固体物理]