用低压反应离子镀技术制备的类金刚石薄膜及其表征  

Diamond-like Carbon Films Prepared by RLVIP Technique and Their Characteristics

作　　者：单兆会[1,2] 高劲松[1] 王彤彤[1] 申振峰[1] 陈红[1] 

机构地区：[1]中国科学院长春光学精密机械与物理研究所中国科学院光学系统先进制造技术重点实验室,吉林长春130033 [2]中国科学院研究生院,北京100039

出　　处：《红外》2011年第8期8-11,共4页Infrared

基　　金：国家自然科学基金项目(60478035)

摘　　要：以Ar气作为工作气体,CH_4作为反应气体,利用低压反应离子镀(RLVIP)技术在Ge基底上成功制备出类金刚石(DLC)薄膜。通过拉曼光谱、Perking Elmer GX型红外光谱仪和Nano Indenter XP型纳米压痕硬度测试计分别表征了类金刚石薄膜的微观结构、光学性能和机械性能。结果表明,类金刚石薄膜(I_D/I_G=0.918)具有较高的sp^3键含量,其硬度值达到28.6GPa,弹性模量为199.5GPa;单层膜系在8～11.5μm波段的峰值透过率为63.6%,平均透过率为62%。When taking Ar gas as the working mixture and taking CH4 as the reactive gas,diamond-like carbon（DLC） films are successfully prepared on Ge substrates by using the low voltage reactive ion plating（RLVIP） technology.The microstructures,optical properties and hardness of the prepared DLC films are characterized by means of Raman spectroscopy,infrared spectroscopy and nano-indentation test technology.The result shows that the prepared DLC films（ID/IG =0.918） have a higher sp^3 content,a hardness up to 28.6 GPa and a elastic modulus of 199.5 GPa.The single layer film has a peak transparency of 63.6%and a mean transparency of 62%in the waveband from 8μm to 11.5μm.

关 键 词：低压反应离子镀 类金刚石薄膜 拉曼光谱 显微硬度 

分 类 号：O484[理学—固体物理] TB43[理学—物理]