多脉冲飞秒激光对锗材料的烧蚀效应  

Ablation morphology of germanium with multi-pulse femtosecond laser

作　　者：辛建婷[1] 谭放[1] 罗国强[2] 马小军[1] 赵宗清[1] 韩丹[1] 

机构地区：[1]中国工程物理研究院激光聚变研究中心,四川绵阳621900 [2]武汉理工大学材料复合新技术国家重点实验室,武汉430070

出　　处：《强激光与粒子束》2011年第7期1753-1757,共5页High Power Laser and Particle Beams

基　　金：国家自然科学基金项目(10902101)

摘　　要：开展了脉宽为40 fs的不同数量激光脉冲对锗材料的烧蚀效应实验,采用扫描电镜、激光共聚焦显微镜等方法对不同数量的飞秒激光脉冲作用下锗材料表面烧蚀区进行了检测,并对作用后材料烧蚀形貌演化规律进行了分析,初步分析了锗材料烧蚀区周围形成的不同环区的形貌特征及成因,对各环区烧蚀形貌特征随激光作用脉冲数的增加而产生的形貌演化过程进行了观测。并给出单脉冲飞秒激光对锗材料的烧蚀阈值为1.2 J.cm-2,采用激光共聚焦显微镜测得该阈值条件下单个飞秒激光脉冲对锗材料的烧蚀深度约为150 nm。Ablation morphology on germanium surface using multi-pulse femtosecond laser is reported.The SEM and laser focus give magnified views of the ablated portion.The ablation morphology shows a periodic surface structure with various laser pulses.And the formation of amorphous rings and ripples in the damage spot is discussed.The ablation threshold is 1.2 J·cm-2 and the ablation depth with single femtosecond laser pulse is about 150 nm.It is meanful for research the interaction of femtosecond laser and material,and the application of femtosecond laser in micromachining.

关 键 词：飞秒激光 锗 烧蚀阈值 烧蚀形貌 扫描电镜 

分 类 号：TN249[电子电信—物理电子学]