基于子孔径拼接原理检测大口径光学元件  

Large aperture optical components test based on sub-aperture stitching

作　　者：云宇[1] 彭勇[1] 田小强[1] 周文超[1] 

机构地区：[1]中国工程物理研究院应用电子学研究所,四川绵阳621900

出　　处：《强激光与粒子束》2011年第7期1831-1834,共4页High Power Laser and Particle Beams

摘　　要：为了实现小口径干涉仪对大口径光学元件的低成本、高分辨力检测,可采用子孔径拼接方法。在对拼接算法进行改进的基础上,开发了拼接检测软件;建立了一套拼接检测系统,开展了大口径平面光学元件的子孔径拼接检测实验研究。利用9个60 mm×60 mm子孔径拼接来检测120 mm×120 mm的光学元件,检测结果表明:峰谷值误差为2.37%,均方根值误差仅为0.27%。Sub-aperture stitching can be used to measure large aperture optical components with low cost and high resolution by a small aperture interferometer.A program based on the improved sub-aperture stitching algorithm was compiled,and the platform for sub-aperture stitching test was established.The experimental stitching that tested a 120 mm×120 mm optical component by nine 60 mm×60 mm planar sub-apertures was performed.The peak-valley error of test was 2.37% and the root-mean-square error was only 0.27%.

关 键 词：大口径光学元件 子孔径拼接 最小二乘法 光学检测 

分 类 号：TH741[机械工程—光学工程]