基于FPGA的金属膜厚检测系统  

Thickness Detecting System of Metal Film Based on FPGA

作　　者：陈立晶[1] 王化祥[1] 尹武良[1] 

机构地区：[1]天津大学电气与自动化工程学院,天津300072

出　　处：《测试技术学报》2011年第4期322-326,共5页Journal of Test and Measurement Technology

基　　金：国家自然科学基金国际重大合作项目(60910001);天津市自然科学基金(08JCYBJC26100);教育部博士点基金(20090032110062);新教师基金(200800561063)

摘　　要：根据多频电涡流检测原理,设计了基于FPGA的检测系统,实现了涡流传感器的多频激励和阻抗分析,发现传感器的峰值特征频率与被测金属膜厚相关,进而从峰值特征频率捡取金属的膜厚信息.通过对多层铝箔进行测量实验,并采用保形拟插值对实验数据进行拟合,得到满意的测试结果.系统基于FPGA架构,可实现对金属膜厚度的实时、在线测量.On the basis of eddy current principles, a detecting system based on FPGA was designed, achieving multi-frequency excitation and impedance analysis of eddy current sensor. The peak characteristic frequency of sensor is related to the thickness of metal film under test, and then film thickness information can be ex- tracted from it. Experiment was conducted on multilayer aluminum foils and shape-preserving interpolation was used to fit experimental data, and satisfying experimental results were obtained. Based on FPGA, real- time and on-line measurement can be achieved.

关 键 词：多频涡流检测 厚度测量 FPGA 标定 保形插值 

分 类 号：TP216.1[自动化与计算机技术—检测技术与自动化装置]