Si_3N_4波导上的费涅尔透镜  

Fresnel lenses in silicon nitride waveguides

作　　者：蔡德水[1] 管秀荣 李树荣 胡鸿章 

机构地区：[1]天津大学精密仪器工程系

出　　处：《光学学报》1989年第10期938-943,共6页Acta Optica Sinica

基　　金：国家自然科学基金资助的项目

摘　　要：本文提出一种新型的费涅尔波导透镜.它不仅具有衍射受限的聚焦特性,而且有与理想费涅尔波导透镜几乎一样的效率,并使工艺简化.在氮化硅波导上进行的工艺实验表明,实验结果与理论分析具有较好的一致性.An improved Fresnel waveguide lens is presented. It not only exhibits theoretically excellent focusing characteristics and has almost the same efficiency as that of ideal Fresnel lens, but also simplifies the mask process. We give experimental results concerning these lenes (f/D = 5, 2mm aperture) in silicon nitride waveguides. Nearly diffraction limited focusing characteristics and high efficiency (60%) were experi mentally obtained. The experiment results are in good agrement with theoretical analysis.

关 键 词：集成光学 波导 费涅尔透镜 氮化硅 

分 类 号：TN256.02[电子电信—物理电子学]