基于SOI非对称马赫曾德尔结构的集成矢量和微波光子移相器(英文)  

Integrated vector sum microwave photonic phase shifter based on asymmetric Mach-Zendner structure in SOI

作　　者：肖永川[1] 瞿鹏飞[1] 周敬然[1] 刘彩霞[1] 董玮[1] 陈维友[1] 

机构地区：[1]吉林大学电子科学与工程学院集成光电子学国家重点联合实验室,吉林长春130012

出　　处：《中国光学》2011年第4期418-422,共5页Chinese Optics

基　　金：国家自然科学基金资助项目(No.61077046);吉林省科技发展计划资助项目(No.20090105);吉林大学基本科研业务费资助项目(No.200903084)

摘　　要：设计和分析了一种基于SOI(绝缘体上的硅)脊型波导非对称马赫曾德尔结构的集成矢量和微波光子移相器。对于10 GHz的微波信号,设定非对称两臂的长度差为3 983μm时,其相应的时间延迟约为47 ps。分别在两臂上集成了一个热光可调谐可变光衰减器用于光学调谐,当衰减单元的折射率在0～6×10-3变化时,实现了10 GHz微波信号在0～180°的相位调谐。该器件尺寸小、结构紧凑,易于实现片上集成,在光控相控阵雷达中很有应用前景。An integrated vector sum microwave photonic phase shifter（MWPPS） based on the asymmetric Mach-Zendner structure in Silicon on Insulator（SOI） rib waveguides was designed and fabricated for the first time.A fixed true time delay of 47 ps was achieved by a length difference of 3 983 μm between the two asymmetric arms.Then two thermo-optical Variable Optical Attenuators（VOAs） were integrated in the two arms respectively to tune the optical power individually.The phase shift ranging from 0° to near 180° for a 10 GHz microwave signal has been achieved by the RI variation of 06×10-3 in VOAs.The device which has a very compact size could be easily integrated in silicon optoelectronic chips and expected to be widely used in Optically Controlled Phased Array Radars（OCPARs）.

关 键 词：移相器 微波光子学 绝缘体上的硅 

分 类 号：TN256[电子电信—物理电子学]