表面微加工MEMS三维模型的局部变动  

Local Variation for 3D Geometric Model of Surface Micromachined MEMS Devices

作　　者：凌浩[1] 李建华[1] 刘玉生[2] 郭卫斌[1] 何高奇[1] 

机构地区：[1]华东理工大学计算机科学与工程系,上海200237 [2]浙江大学计算机辅助设计与图形学国家重点实验室,杭州310027

出　　处：《华东理工大学学报（自然科学版）》2011年第4期474-482,共9页Journal of East China University of Science and Technology

基　　金：国家自然科学基金(60703026);上海市自然科学基金项目(10ZR1408200)

摘　　要：现有的微机电系统(MEMS)设计中缺乏面向优化的MEMS器件变动方法。针对表面微加工MEMS,在可制造性分析的基础上提出了表面微加工MEMS三维模型的局部变动方法。该方法首先在表面微加工MEMS三维模型上选定设计关注面,设计人员对所选定的设计关注面进行变动操作;变动设计后根据变动类型基于可制造性分析自动映射和传播变动到表面微加工MEMS三维模型;在三维模型更新后,通过传播定位了该变动操作所要修改的掩模,更新该掩模文件,实现工艺模型和几何模型的一致性。实例测试结果表明:该方法能够有效地实现三维模型的局部变动,从而提高了MEMS设计人员的效率。In the design of MEMS device,a main problem is to lack the variation method of orienting optimization.By analyzing the manufacturability,this paper proposes a local variation method for 3D geometric model of surface micromachined MEMS devices.Firstly,a concerned face is selected on the 3D geometric model,and a local variation operation is executed in the chosen face.Secondly,the variation operation is mapped automatically and propagated to the 3D geometric model based on manufacturability analysis.Thirdly,a certain mask is determined via variation mapping and propagation of 3D model,and this mask is updated to keep the consistency of the geometrical model and process model.Finally,the experiment results show that the proposed method can effectively achieve the local variation of the 3D geometric model,and promote the efficiency of designer.

关 键 词：表面微加工 微机电系统 变动 掩模映射 

分 类 号：TP391.7[自动化与计算机技术—计算机应用技术]