基于绝缘硅的微环谐振可调谐滤波器  

Tunable Filters Based on SOI Microring-resonator

作　　者：李帅[1] 吴远大[1] 尹小杰[1] 安俊明[1] 李建光[1] 王红杰[1] 胡雄伟[1] 

机构地区：[1]中国科学院半导体研究所集成光电子学国家重点实验室,北京100083

出　　处：《光子学报》2011年第8期1143-1148,共6页Acta Photonica Sinica

基　　金：国家高技术研究发展计划(No.2007AA03Z420);国家重点基础研究发展计划(No.2007CB613404)资助

摘　　要：采用电子束光刻和感应耦合等离子刻蚀等工艺,研制了一种基于绝缘硅材料的的微环谐振可调谐滤波器.滤波器微环半径为5μm左右,波导截面尺寸为(350～500nm)×220nm不等.测试结果表明,波导宽度为450nm时器件性能最为理想,其自由频谱宽度为16.8nm,1.55μm波长附近的消光比为22.1dB.通过对微环滤波器进行热光调制,在21.4℃～60℃温度范围内实现了4.8nm波长范围的可调谐滤波特性,热光调谐效率达到0.12nm/℃.研究了基于单环和双环的多通道上下载滤波器,实验结果表明多通道滤波器的信号传输存在串扰,主要是不同信道之间的串扰,尤其在信号上载时,会在相邻信道产生较大串扰.Microring-resonator filters were fabricated based On Silicon on Insulator（SOI） nano-wire waveguide,adopting Electron-Beam photolithography（EBL） and Inductive-Coupled-Plasma（ICP） etching technology,etc.The cross-section size of the strip waveguides were（350～500 nm）×220 nm,respectively,and the bending radius of the microring was around 5 μm.The measured results show that performance of devices are much better with waveguide width 450 nm,the free spectral range（FSR） is 16.8 nm,and extinction ratio（ER） around the wavelength 1 550 nm is 22.1 dB.After thermally tuned,the tuning bandwidth reaches 4.8 nm,and the tuning efficient is 0.12 nm/℃.Meanwhile,multi-channel filters were fabricated and studied based on single-ring and double-ring.After experiments,some conclusions were drawn： crosstalk exists in the signal transmission in multi-channel filters,mainly among different transmission channels,and the crosstalk is fairly distinct when there are signals input to add ports.

关 键 词：绝缘硅 微环谐振 热光效应 滤波器 串扰 

分 类 号：TN25[电子电信—物理电子学]