紫外激光双光头精细加工系统及其应用  

UV Laser Fine Processing System with Two Optical Module and Its Application

作　　者：姜兆华[1,2] 张伟[1,2] 潘涌[1,2] 骆公序[1,2] 沈冠群[1,2] 

机构地区：[1]上海市激光技术研究所,上海200233 [2]上海市激光束精细加工重点实验室,上海200233

出　　处：《应用激光》2011年第4期279-284,共6页Applied Laser

基　　金：上海市科学技术委员会资助项目(项目编号:09-111;09dz)

摘　　要：采用355 nm波长、高重复频率、短脉冲DPSS紫外激光器作为光源,开发了激光精细加工装备,具有光束高速旋转打孔和光束偏转扫描加工两种不同的加工方式,两种加工方式可便捷切换,满足不同量级孔径的高质量激光精细加工需求。设计了专用的接近衍射极限的紫外光束旋转聚焦物镜和远心扫描透镜,保证了加工质量。Using a wavelength of 355 nm high-repetition rate, short pulse all-solid-state laser as a light source, developed a laser fine processing equipment, with beam high-speed helical drilling and beam deflection scan processing, Two different processing methods can be easily switched, Meet the different order of magnitude aperture high-quality laser precision machining applications. Design of a dedicated close to the diffraction limit of the UV focus lens for the beam helical drilling and of the telecentric f-θ scan lens, Ensure processing quality.

关 键 词：光束旋转 光束偏转扫描 DPSS激光器 激光精细加工 微孔加工 衍射极限 远心扫描透镜 

分 类 号：TN248[电子电信—物理电子学] V261.8[航空宇航科学与技术—航空宇航制造工程]