PECVD制备类金刚石薄膜的光学特性  

Optical Analysis of Diamond-like Carbon Films Prepared by PECVD

作　　者：潘德芳[1,2] 苑进社[1,2] 

机构地区：[1]重庆师范大学物理与电子工程学院,重庆400047 [2]重庆市高校光学工程重点实验室,重庆400047

出　　处：《重庆理工大学学报（自然科学）》2011年第8期111-116,共6页Journal of Chongqing University of Technology：Natural Science

基　　金：国家自然科学基金资助项目(10474078);重庆师范大学博士启动基金资助项目(06XLB008)

摘　　要：在室温条件下利用射频等离子增强化学气相沉积技术在Si衬底和玻璃沉底上制备了类金刚石薄膜。通过对Si衬底生长的DLC薄膜的反射光谱分析发现DLC薄膜具有一定的减反射效果。玻璃衬底上制备的DLC薄膜的透射光谱分析表明制备的DLC薄膜在可见光区具有一定的增透作用。理论分析认为DLC薄膜透光性能主要与薄膜的sp3键的百分含量有关,当sp3键含量高时,光学透过性好,当sp3键含量低时,光学透过性差。DLC薄膜在He-Cd脉冲光激发下PL谱分析发现DLC薄膜的发光峰为460 nm,在该条件下制备的DLC薄膜光学带宽是2.7eV,认为DLC薄膜发光主要是通过sp2原子团簇中电子空穴对的辐射复合而完成。In this paper,the films were successfully prepared on Si and glass substrates by radio frequency plasma enhanced chemical vapor deposition（RF-PECVD） under the condition of room temperature.It is noted that the reflection spectrum of DLC films prepared on Si substrate has the property of protective reflective layer.Obviously,the transmission spectrum of DLC films shows that DLC films have certainly increased transmission within the visible area.It was found that the transmission of the DLC films was primarily related to percentage of sp3 bonds.In the case of the proportion of sp3 bonds,when it was high the optical transmission was excellent,otherwise,the optical transmission was poor.It was also found that the illumination peak of DLC films from the PL spectrum locates at 460nm with the DLC films analysis by the He-Cd pulse photoexcitation.As a result,the DLC thin-films band gap was calculated to be as 2.7eV.It is theoretically noted that the light-emitting of DLC films results mainly from the radiative recombination of electron-hole pair of the sp2 clusters.Meanwhile,the experimental study indicated that the DLC films have few sp2 bonds.

关 键 词：类金刚石薄膜 反射光谱 透射光谱 PL谱 

分 类 号：O484[理学—固体物理]