硅切割废砂浆回收现状  

Present recycling status of drained slurry generated by cutting silicon crystal

作　　者：仝宇[1] 徐冬梅[1] 齐维[1] 丛明辉[1] 

机构地区：[1]山东科技大学化学与环境工程学院,山东青岛266510

出　　处：《无机盐工业》2011年第9期5-7,共3页Inorganic Chemicals Industry

基　　金：山东科技大学"春蕾计划"资助项目(2008BWZ055)

摘　　要：介绍了硅切割废砂浆的来源、组成及性质。综述了国内外硅切割废砂浆回收技术现状,根据现行硅切割废砂浆回收技术的成熟程度和硅组分的利用情况,将回收技术分为3种类型:1)一般回收技术,即只回收切削液和碳化硅磨料,不回收硅粉;2)高效回收技术,即同时回收切削液、碳化硅磨料和硅粉;3)间接回收技术,即利用碳化硅的化学稳定性,将硅粉制备成其他化工产品,从而实现硅粉的有效利用。分析了硅切割废砂浆回收可能面临的问题,并对今后的研究提出了建议。The source,composition,and properties of drained slurry generated by cutting silicon crystal were introduced.Present status and related technologies of drained slurry recycling at home and abroad were also summarized.According to the degree of maturation of existing drained slurry recovering technologies and the utilization of silicon in drained slurry,the existing recycling technologies may be classified into three categories：1） General recovery technology,i.e.only recovering SiC abrasives and PEG cutting fluids without silicon powder;2） High efficiency recovery technology,i.e.recovery of SiC abrasives,PEG cutting fluids,and silicon powder in drained slurry at the same time;3） Indirect recovery technology,i.e.preparation of chemical products from silicon powder by taking advantage of the chemical stability of SiC,then silicon powder in drained slurry can be efficiently used.Problems may be faced in recycling process were analyzed and suggestions for the future study in this aspect were also proposed.

关 键 词：废砂浆 硅 碳化硅 回收 

分 类 号：TQ06[化学工程]