氧化温度对TiAlN薄膜成分的影响  

The Effect of Oxidation Temperature on the Composition of TiAlN Coatings

作　　者：霍红英[1] 邹敏[1] 张勇 

机构地区：[1]攀枝花学院,攀枝花617000 [2]成都东泰工业有限公司,成都610100

出　　处：《表面技术》2011年第5期48-50,共3页Surface Technology

摘　　要：采用磁控溅射方法在硬质合金表面沉积TiAlN硬质薄膜,并在400～850℃的温度下进行氧化处理,通过XPS分析氧化后薄膜表面层的物质组成及变化。结果表明:氧化后的薄膜表面层存在AlN,TiN,Al2O3,TiO2和N—O;随着氧化温度的升高,氧元素和铝元素增加,氮元素和钛元素减少,最终在薄膜表面形成一层耐高温的Al2O3保护层。The experiment deposited TiA1N coatings on top of the cemented carbides first and then took these samples oxidized from 400℃ to 850℃ for half an hour. The aim is to analysis how the composition changes while the oxidizing temperature rises via XPS method. Experimental result shows that on the face of oxidized TiAIN coatings are comprised of A1N, TiN, A12O2 , TiO2 and N--O chemical bond. With the rise of the oxidizing temperature, the element of nitrogen and titanium reduce while the oxygen and the aluminum increase . Finally a protective layer of AI2 O3 on the face of TiA1N coatings is generated.

关 键 词：TIALN薄膜 氧化处理 成分分析 

分 类 号：TG174.444[金属学及工艺—金属表面处理]