采用新型混合材料的多波长激光减反射膜的研制  

Study and Fabrication of Multi-Wavelength Laser Antireflection Film Using New Mixed Material

作　　者：杨永亮[1] 付秀华[1] 刘国军[1] 李美萱[1] 杨道奇[1] 

机构地区：[1]长春理工大学光电工程学院,吉林长春130022

出　　处：《中国激光》2011年第10期150-155,共6页Chinese Journal of Lasers

基　　金：国家重点实验室基金(9140c3104030902)资助课题

摘　　要：针对激光致盲武器的特殊要求,借助Macleod和TFCalc软件,选择H4和YbF3作为高低折射率材料进行膜系优化设计,采用电子束真空镀膜的方法并加以离子辅助沉积技术,通过正交矩阵实验对材料的工艺参数进行调整和优化,在蓝宝石基底上,制备了符合要求的宽带增透膜。镀膜后的蓝宝石基片在532、808、905、980和1064 nm波长处的透射率大于97%,中红外波段3~5μm的平均透射率大于92%。通过内保护层技术的引入,进一步提高了膜层的激光损伤阈值。该薄膜可以同时满足多个激光波长的使用要求,拓宽了其应用范围,降低了使用成本。With the purpose of meeting the special requirement of laser blinding weapons,choosing H4 as the material of high refractive index and YbF3 as the material of low refractive index,the film system is designed and optimized with the help of Macleod and TFCalc softwares.By adopting electron beam vaccum depositing method with the aid of ion assistant deposition technology,as well as using orthogonal matrix tests to adjust and optimize technological parameters of the materials,antireflection（AR） coatings on the substrate of sapphire to meet the demand are deposited.The transmittances at 532,808,905,980 and 1064 nm are greater than 97%,and it makes the average transmittance over 92% in the 3~5 μm band.The laser induced damage threshold（LIDT） of AR coatings is further increased by adding inner barrier layer.This film can satisfy the requirement of many laser wavelengths at the same time,widening the range of its application and reducing the costs.

关 键 词：薄膜 减反射膜 激光损伤阈值 离子辅助沉积 内保护层 

分 类 号：O484.4[理学—固体物理]