O型MEMS平面微弹簧弹性系数研究  

Study on the Spring Constant of O-Shaped MEMS Planar Microsprings

作　　者：吴鹏飞[1] 张国俊[1] 钟志亲[1] 戴丽萍[1] 王姝娅[1] 

机构地区：[1]电子科技大学电子薄膜与集成器件国家重点实验室,成都610054

出　　处：《微纳电子技术》2011年第10期660-663,共4页Micronanoelectronic Technology

摘　　要：对封闭O型MEMS平面微弹簧建立力学分析模型,用卡氏第二定律和胡克定律推导出这种平面微弹簧弹性系数的计算公式,并用ANSYS进行有限元仿真,仿真结果表明,两者的相对误差低于2%。在计算公式和仿真的基础上,研究了各种结构参数对弹性系数的影响规律,结果表明,弹性系数随节数和弯半径的增大而减小,随梁宽和厚度的增大而增大。研究结果为其他封闭结构的MEMS平面微弹簧的分析和设计提供了一定的借鉴。The mechanics model of a closed and O-shaped MEMS planar microspring was established and the calculation formula for the spring constant of the planar microspring was derived by Card＇s second law and Hooke＇s law. The results of the ANSYS finite element simulation show that their relative errors are below 2%. On the basis of the calculation formula and the simulation, the effect conditions of various structural parameters on the spring constant were researched. The results indicate that the spring constant decreases with the increase of number and bend radius, and increases with the increase of the width and thickness of the microspring. The results provide some references for the analysis and design of the other closed structures of MEMS planar mierosprings.

关 键 词：微机电系统(MEMS) 平面微弹簧 卡氏第二定律 弹性系数 有限元方法(FEM) 

分 类 号：TH703[机械工程—仪器科学与技术]