基于硅(111)晶向的图像分割测速光栅设计  

Design of velocity measurement grating by image segmentation based on(111) silicon crystallographic orientation

作　　者：孙超[1] 马任德[1] 许海鑫[1] 孙维康[1] 

机构地区：[1]曲阜师范大学物理工程学院,山东曲阜273165

出　　处：《激光杂志》2011年第5期19-21,共3页Laser Journal

基　　金：国家自然科学基金10947007

摘　　要：通过对运动物体表面图像进行分割,可测量其运动速度。首先,设计了基于硅(111)晶向设计了光栅模板,举例给出了以此模板制作闪耀光栅的方法;其次,对所设计闪耀光栅的工作原理进行分析,认为所设计的闪耀光栅可看作三个光栅的组合,井对光栅衍射光强分布进行了模拟仿真,指出忽略小平台构成的光栅对梯形左右斜边构成的光栅的影响是可以的;最后,给出了利用所设计的闪耀光栅对物体表面进行图像分割的方法。The velocity of the moving object can be measured by suiface image segmentation. First, a template was designed based on the crystal orientation （ 111 ） silicon wafer. And the method to make a blazed gratings use this template was given as an example; secondly, the working principle of the designed grating was analyzed, it is considered to be made up of three gratings. The simulation of the grating diffraction light intensity distribution was given, and it is point out that it is enough precise to neglect the grating that is make up by the small platform. Finally, the image segmentation method using the designed blazed grating was given.

关 键 词：速度测量 硅(111)晶向 闪耀光栅 图像分割 折射率匹配 V型槽 

分 类 号：O436.1[机械工程—光学工程]