温度对精密定位工作台的影响及其补偿  

Compensation of Temperature Effect on Precision Positioning Stage

作　　者：程维明[1] 姜克壮[2] 孙麟治[2] 

机构地区：[1]上海工程技术大学机械工程学院,上海201620 [2]上海大学机电工程与自动化学院,上海200072

出　　处：《上海工程技术大学学报》2011年第3期191-194,共4页Journal of Shanghai University of Engineering Science

基　　金：教育部高等学校重点学科建设资助项目(Y0102);上海市重点学科建设资助项目(BB67)

摘　　要：温度变化对于大行程、高精度精密定位平台的精度有较大的影响,为此,提出了一种基于定位工作台热膨胀模型的实时温度补偿方法.试验结果表明,该补偿方法可将因温度影响而产生的工作台漂移均方根值降低80%以上,并且方法简单可靠,易实现实时补偿,能有效提高定位工作台的实际精度.The variation of the temperature has great influences on the precision of a positioning stage with large stroke and high precision. A kind of real-time temperture compensation method based on the thermal expansion model of the positioning stage was put forward. The experimental result shows that the compensation method proposed can reduce the root mean square value of stage drifting caused by temperature variation more than 80%. The method is simple, reliable, easier to realize a real-time temperature compensation and can improve the real precision of the positioning stage effectively

关 键 词：精密定位 热膨胀 温度 补偿 

分 类 号：TH16[机械工程—机械制造及自动化]