基于离子蚀刻技术实现石英晶振的频率微调  

Quartz Crystal Frequency Trimming Technology Based on Ion Etching

作　　者：陈强[1] 

机构地区：[1]苏州大学电子信息学院,江苏苏州215021

出　　处：《苏州市职业大学学报》2011年第3期34-36,共3页Journal of Suzhou Vocational University

摘　　要：近年来随着机器的小型化、成本的降低,各石英晶振生产企业不断追求生产效率的提高以及精度的提高.在石英晶振生产过程中,目标频率的微调较大程度影响着石英晶振的精度.应用石英晶振的原理,基于蚀刻技术实现石英晶振的频率微调,从而提高石英晶振的精度.As an oscillator with high Q value,accuracy and stability,quartz crystal has been widely used in various communication facilities,industrial equipment and consumer electronics,replacing LC oscillation loop circuits.With the trend of miniaturization of machines and reduction of costs in recent years,the manufacturers of quartz crystal attempt to improve productivity and accuracy.In the process of production,target frequency trimming affects the accuracy of quartz crystal to a large extent.This paper proposes the application of ion-etching technology for its frequency trimming to improve its accuracy based on the principle of quartz crystal.

关 键 词：石英晶振 离子蚀刻 频率微调 

分 类 号：TB123[理学—工程力学]