现场真空校准装置的设计  

DESIGN OF VACUUM CALIBRATION APPARATUS IN SITE

作　　者：冯焱[1] 孙雯君[1] 成永军[1] 赵澜[1] 

机构地区：[1]兰州空间技术物理研究所,甘肃兰州730000

出　　处：《真空与低温》2011年第3期166-169,共4页Vacuum and Cryogenics

摘　　要：基于客户提出的在工作现场对真空计进行校准的切实需求,研究并设计了现场真空校准装置。该装置主要由供气和进样模块、抽气模块、压力衰减模块、压力测量与校准模块、烘烤模块等五部分组成。考虑到现场环境对真空计的影响和校准装置易于携带、小型化的要求,设计中采用了模块化分体式结构,复合了静态比较法、动态比较法和压力衰减法等真空校准方法。可根据不同的校准需求,选配不同的模块和方法实现对真空计的校准。现场真空校准装置预计达到的技术指标是,校准范围为10-4～105Pa,合成标准不确定度小于7%。Base on the requirement of the calibration for vacuum gauge in operational site,the vacuum calibration apparatus in site has been designed.The calibration apparatus is made up of gas supply module,pump module,pressure decay module,pressure measurement and calibration module and bake module.Consideration the effect of environment in site for vacuum gauge and the requirement of portability and miniaturization for the apparatus,the modularization and split architecture is used in the design.There are three methods for calibrating vacuum gauge.They are static comparison method,dynamic comparison method and pressure decay method.Different modules and methods can be selected to calibrate the vacuum gauge for the different calibration requirement.The calibration range of the apparatus in operational site is 10-4～105Pa.The combined standard uncertainty is less than 7%.

关 键 词：真空计量学 校准装置 校准方法 真空计 现场 

分 类 号：TB77[一般工业技术—真空技术]