利用LIGA技术研制微细电火花异形和阵列结构电极  

The Fabrication of Micro Poles with Array and Abnormity Structures for EDM Using LIGA Process

作　　者：伊福廷[1] 李勇[2] 刘改红[2] 

机构地区：[1]中国科学院高能物理研究所,北京100049 [2]清华大学精密仪器与机械学系,北京100084

出　　处：《电加工与模具》2011年第5期14-17,25,共5页Electromachining & Mould

基　　金：国家高技术研究发展计划(863计划)资助项目(2006AA04Z317);国家自然科学基金资助项目(50972144);教育部科研基地机电工程与控制国家重点实验室科技支撑计划资助项目

摘　　要：利用LIGA技术的优势,针对电火花电极结构特点开发出相应的加工工艺,完成电火花复杂结构电极的制造。电火花电极的特点是大高宽比的金属柱状结构,这对于LIGA技术工艺具有特殊的难度,需要突破深孔显影和电铸工艺难题。通过大量的工艺试验,优化出电火花电极阵列结构的工艺路线,圆满完成阵列结构和异形复杂结构的电极制造,为电火花技术在新领域的应用提供了技术支持。The new process with LIGA technology should be designed and developed to meet and finish the fabrication of convex structure with high aspect ratio for electrode pillars of EDM by completely using the advantages of LIGA technique. The obvious characteristic of metal electrode pillars for EDM is the high aspect ratio of the structures which takes much problem with normal LIGA process. The process has been optimized by much more experiments to make the metal structures of very high aspect ratio with array and abnormity shapes which will meet the needs for EDM in wider fields.

关 键 词：电火花电极 异形阵列电极 大高宽比金属结构 LIGA技术 

分 类 号：TH164[机械工程—机械制造及自动化]