一种基于MEMS工艺的新型THz喇叭天线的设计与仿真  

Design and Simulation of Novel THz Horn Antenna Based on MEMS Technology

作　　者：郭林[1] 黄风义[1] 唐旭升[1] 

机构地区：[1]东南大学信息科学与工程学院,南京210096

出　　处：《电子器件》2011年第5期507-510,共4页Chinese Journal of Electron Devices

基　　金：国家科技重大专项(2009ZX03007-001-01);国家863项目(2009AA01Z261;2009AA01Z228)

摘　　要：提出了一种太赫兹(THz)天线结构:基于MEMS工艺的THz角锥喇叭天线。采用电磁场仿真软件Ansoft HFSS 11对所设计的天线进行仿真,结果表明该天线在2.5 THz～3.5 THz范围以内具有回波损耗优于-25 dB,增益大于15 dB的良好特性。天线可以通过MEMS工艺(硅基KOH刻蚀)制造,具有加工费用低的优点,适用于THz雷达,通信和成像系统等太赫兹系统。A new kind of terahertz（THZ）antenna,pyramidal horn antenna is presented based on MEMS technology.Simulation by the full wave electromagnetic simulator Ansoft HFSS 11 shows the antenna gets an average gain above 15 dB covered in the interested band（2.5 THz^3.5 THz）with a return loss better than-25 dB.The proposed antenna can be processed by the MEMS Technology（KOH etching of silicon）with low fabrication cost.The antenna is suitable for used in many terahertz systems,such as in THz radar,communication and imaging systems.

关 键 词：太赫兹(THz)天线 角锥喇叭天线 微电子机械系统 氢氧化钾刻蚀 

分 类 号：TN823[电子电信—信息与通信工程]