MEMS质谱仪研究综述  

Review of MEMS Mass Spectrometry

作　　者：唐飞[1] 陈一[1] 王晓浩[1] 

机构地区：[1]清华大学精密仪器与机械学系/精密测试技术及仪器国家重点实验室,北京100084

出　　处：《现代科学仪器》2011年第5期35-39,共5页Modern Scientific Instruments

摘　　要：近年来,小体积、低功耗、价格低廉、使用方便的MEMS质谱仪成为了质谱领域的研究重点和热点。目前国外对MEMS质谱仪及其相关技术的研究已取得了一些成果,甚至研发出了较为完整MEMS质谱仪。但是整体而言,MEMS质谱仪的性能还很低,其研究主要还处于对其元件分别进行微型化的阶段。其中,MEMS离子源以对电喷雾离子源的研究为主;MEMS质量分析器以对离子阱的研究为主;MEMS离子检测器以对法拉第筒的研究为主。本文总结了MEMS质谱仪的最新成果,同时分析了可能面临的问题。In recent years,the MEMS Mass Spectrometry that is small,low-powered,cheap and easy-used is the focus for the field of mass spectrometry and becomes hot.MEMS MS and its related research has scored some great successes which even some complete MEMS MSs has been reported.The performance of MEMS MS which has been reported is poor,and the research of MEMS MS is focus on the miniaturization of its components,such as MEMS ESI,MEMS Ion trap and MEMS Faraday Cup.This review summarizes the latest achievements in the field of MEMS MS and analyzes the difficulties of the research.

关 键 词：MEMS 质谱仪 离子源 质量分析器 离子检测器 

分 类 号：TH843[机械工程—仪器科学与技术]