静电刚度式谐振微加速度计闭环驱动控制  

Closed-loop control for resonant accelerometer based on electrostatic stiffness

作　　者：刘恒[1,2] 何晓平[2] 张凤田[2] 苏伟[2] 张富堂[2] 

机构地区：[1]重庆大学通信工程学院,重庆400030 [2]中国工程物理研究院电子工程研究所,四川绵阳621900

出　　处：《控制理论与应用》2011年第10期1405-1412,共8页Control Theory & Applications

基　　金：国防预研项目资助项目(51305040201);中国工程物理研究院科学技术发展基金资助项目(2009B0403044)

摘　　要：分析了谐振微加速度计闭环驱动控制的要求,并根据要求建立了幅度和频率自适应控制的双闭环驱动分析模型.鉴于系统的高阶非线性,采用近似平均法分析了系统的稳态平衡点和稳定条件.对基于锁相技术的频率跟踪环,得到了环路频率稳定跟踪的积分控制器临界条件.对基于自动增益的幅度控制环,分析表明在没有PI控制器时不能实现恒幅振动,在引入PI控制器后,振动幅度与品质因数和频率无关;同时,较小的直流参考电压能实现同样大的振幅.仿真结果有效的验证了上述结论,理论分析和仿真有助于驱动电路的设计和调试.We investigate the requirements of closed-loop control for a resonant micro-accelerometer, for. which we develop a closed-loop of gain-control for stabilizing the amplitude and a phase-locked loop for tracking the frequency. Because of the obstacle of high order of nonlinearity of the system, we had to employ the average method for analyzing the system stability and determining the equilibrium point. The analysis reaches a critical condition for the integral controller in the stable tracking of the closed-loop frequency. As for the amplitude-stabilization loop with auto-gain, the analysis shows that an oscillation with constant amplitude can not be achieved without a PI controller. When the PI controller is introduced, the oscillation amplitude and the performance index are independent from the frequency, and the same value of amplitude can be realized by a smaller value of the reference voltage. Simulation results confirm the above conclusions. When combined with the theoretical analysis, they are instrumental to the design and testing of driving circuits.

关 键 词：加速度计 谐振 恒幅 频率跟踪 平均法 

分 类 号：TH824.4[机械工程—仪器科学与技术]