三振镜光扫描系统设计  

The Design of an Optical Scanning System of Three Galvanometers

作　　者：施亚玲[1] 王又良[1] 郁德明[1] 苏小荣[1] 龚焕明 

机构地区：[1]上海市激光技术研究所

出　　处：《应用激光》1990年第5期215-216,共2页Applied Laser

摘　　要：根据几何光学原理,设计了一个高精度、多功能的三振镜光扫描系统。系统性能优于二振镜系统,定位精度±7μm。We designed an optical scanning system consisted of three galvanometers on prin-ciple of the geometrical optics.The characteristics of the system are high accuracy and multifun-lion.The performance of the system is better than two galvanometer system,and the positionaccuracy is±7μm.

关 键 词：激光刻划 三振镜 光扫描系统 

分 类 号：TH74[机械工程—光学工程]