复杂微系统的端点特性建模理论  

The Terminal Behaviors Modeling Method for Complex Microsystems

作　　者：林谢昭[1,2] 应济[2] 

机构地区：[1]福州大学机械工程及自动化学院,福建福州350002 [2]浙江大学机械与能源工程学院,浙江杭州310027

出　　处：《系统仿真学报》2008年第S1期284-287,共4页Journal of System Simulation

基　　金：国家自然科学基金(50475104);浙江省自然科学基金重点项目(Z106519);福建省教育厅项目(JB07007)

摘　　要：复杂微系统的模拟要求建立统一的、适合于植入电网络仿真器计算的系统级模型。以热力学概念作为通用理论框架,建立多畴耦合微系统通用模型的一般性理论。利用热力学共轭参量"流"和"势"统一表达从属于不同物理域子系统的端点特性,可建立各个子系统多端口组件模型。结合广义的Kirchhoffian网络理论,建立适合于电网络仿真器计算的MEMS系统级模型。便于对MEMS系统进行反复模拟和优化设计。以静电微泵为例,阐述了这一建模方法的有效性。For achieving the whole mixed-technology microsystems simulation results,a uniform modeling method is required for constructing the systems-level model of the microsystems,which should be suitable to be embedded in electric network simulator.By using the concept of thermodynamic theory as a common theoretical framework,which provides a general and uniform physically-based mathematical description of multidisciplinary systems,the subsystems belonging to different domain can be modeled as a multi-terminals element.The internal terminal behaviors of the individual subsystem element can be descried by a couple of conjugate thermodynamic state variables and the pertinent currents and driving force. Combined with the generalized'Kirchhoffian Networks',the descriptions of the system-level model of the whole microsystems can be obtained by connecting these multi-terminal elements together,which is convenience modeling method for repeated simulation and optimization at the MEMS design stage.A systems-level model of an electrostatically actuated micropump is built up as a example for the validity of the modeling method.

关 键 词：端点特性 系统级模拟 Kirchhoffian网络理论 多物理场耦合 MEMS CAD 

分 类 号：TH703[机械工程—仪器科学与技术]