超光滑表面杂质微粒的识别与统计技术  

Study on Detecting and Quantifying Contaminating Particles on Super-Smooth Surface

作　　者：徐传义[1] 史兴宽[1] 麻丽红 

机构地区：[1]西北工业大学,西安710072 [2]航天科工集团第三研究院31所,北京100074

出　　处：《航空精密制造技术》2002年第3期6-10,共5页Aviation Precision Manufacturing Technology

摘　　要：从理论上分析了微粒重叠对测量结果的影响,通过简化模型,给出了对粒子数测量结果的补偿曲线。并建立了分析图象分辨率、微粒识别率和识别阈值三者关系的模型,给出了在识别阈值不变情况下,图象分辨率与微粒识别率的关系图,从而可以选择优化的图象分辨率和微粒识别阈值。By theoretical analysis,the influence particles overlap on measuring r esult is analyzed.The com-pensation curve to the result of particle count measured is given by using a simplified model.The model of the relations among image resolvability,particles detecting efficiency a nd detecting threshold is set up.The relative figure between image resolvability and particles detecting efficiency in constant detecting threshold is p resented,so optimized image resolvability and d etecting threshold could be selecte d.

关 键 词：微粒测量 微粒重叠 识别阈值 超光滑表面 

分 类 号：V261[航空宇航科学与技术—航空宇航制造工程]