用功率谱密度函数评价光学面形中频误差特性  

Evaluating Intermediate Frequency Error Property of Optical Profile with Density Function of Power Spectrum

作　　者：徐芳[1] 魏全忠[1] 伍凡[1] 

机构地区：[1]中国科学院光电技术研究所,四川成都610209

出　　处：《光电工程》1999年第S1期139-143,共5页Opto-Electronic Engineering

摘　　要：采用二维ＰＳＤ功率谱密度函数来评价光学元件面形中频波前．而这部分波前误差在传统的分析中被表示为"残余量"．它们产生的散射会严重地影响光学系统的成象质量。简要叙述了ＰＳＤ的计算方法及实验结果。Evaluating the intermediate frequency wavefront of optical element profile bymeans of 2D power spectral density function, this part of wavefront error is represented as'residual' in the traditional analysis. The imaging quality of the optical system will beseriously affected by their scattering. The calculation method and the experimental resultsof the power spectral density are simply introduced..

关 键 词：面形测量 光学器件 功率谱密度函数 傅里叶分析 

分 类 号：TH74[机械工程—光学工程]