小孔检测方法的研究  

A Study on Mini Hole Inspection

作　　者：杨世民[1] 李书和[1] 张国雄[1] 

机构地区：[1]天津大学精密仪器与光电子工程学院

出　　处：《航空精密制造技术》1998年第4期38-40,共3页Aviation Precision Manufacturing Technology

摘　　要：研究了一种检测小孔的机械式测头，将细测杆视为弹性体，将膜片做为三维敏感元件，通过弹性位移传递原理自动补偿了测杆的受力变形误差。安装在测量机上可以检测Φ０３ｍｍ以上小孔任意截面的尺寸和形状误差，精度优于１μｍ。A probe for mini hole inspection is studied The stylus is regarded as an elastic element and a diaphragm is used as a sensitive element Based on the elastic displacement transmission theory,the deformation of stylus can be compensated automatically The probe mounted on measuring machine can be used to measure the dimensional and form errors of the small holes with diameter large than 0 3mm And the accuracy is better than 1μm

关 键 词：小孔 检测 误差补偿 

分 类 号：TG806[金属学及工艺—公差测量技术] TG806