直流电路系统测试圆光栅的分析与应用  

The Analysis and Application of DC Circuit System for Testing Circular Grating

作　　者：龚亲文 余光清[1] 游素芳 

机构地区：[1]中国科学院光电技术研究所,成都610209

出　　处：《光电工程》1996年第S1期99-103,共5页Opto-Electronic Engineering

摘　　要：分析了采用直流电路系统测试圆光栅直径误差 Φi(或刻线误差 θi)时所产生的差异等问题 ,讲述了能较真实准确地得出圆光栅 Φi(或 θi)这一单项误差指标的测试与数据处理方法。The difference produced in testing circular grating diameter error Φ i (or dividing line error θ i ) with DC circuit system is analyzed.The testing of Φ i (or θ i ) and the data processing method are described.The metod has been fully demonstrated in the experiments and the practical testing results.

关 键 词：光栅检验 误差测量 直径测量 直流电路 圆光栅 

分 类 号：O436.1[机械工程—光学工程]